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Determination of charge state, energy and angular distributions of tin ions emitted from laser produced plasma based EUV sources

  • O. Morris
  • , P. Hayden
  • , P. Dunne
  • , F. O'Reilly
  • , G. O'Sullivan
  • , E. Sokell
  • , E. L. Antonsen
  • , S. N. Srivastava
  • , K. C. Thompson
  • , D. N. Ruzic
  • University College Dublin
  • University of Illinois

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

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