Electrical and chemical characteristics of Al2O3/InP metal-oxide-semiconductor capacitors

Rohit V Galatage, Hong Dong, DM Zhernokletov, B Brennan, Christopher L Hinkle, Robert M Wallace, Eric M Vogel

Research output: Contribution to journalArticlepeer-review

43 Citations (Scopus)
Original languageUndefined/Unknown
JournalApplied Physics Letters
Volume102
Issue number13
Publication statusPublished - 2013

Cite this