III-V/high-k defects: DIGS vs. border traps

  • Christopher L Hinkle
  • , Rohit V Galatage
  • , Hong Dong
  • , Sarkar RM Anwar
  • , Barry Brennan
  • , Robert M Wallace
  • , Eric M Vogel

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)161
Number of pages1
JournalECS Transactions
Volume53
Issue number1
Publication statusPublished - 2013

Cite this