III-V/high-k defects: DIGS vs. border traps

Christopher L Hinkle; Rohit V Galatage; Hong Dong; Sarkar RM Anwar; Barry Brennan; Robert M Wallace; Eric M Vogel

III-V/high-k defects: DIGS vs. border traps

Christopher L Hinkle
, Rohit V Galatage
, Hong Dong
, Sarkar RM Anwar
, Barry Brennan
, Robert M Wallace
, Eric M Vogel

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Original language	Undefined/Unknown
Pages (from-to)	161
Number of pages	1
Journal	ECS Transactions
Volume	53
Issue number	1
Publication status	Published - 2013

Cite this

@article{d6512e65301d41edb369b638ff79898d,

title = "III-V/high-k defects: DIGS vs. border traps",

author = "Hinkle, \{Christopher L\} and Galatage, \{Rohit V\} and Hong Dong and Anwar, \{Sarkar RM\} and Barry Brennan and Wallace, \{Robert M\} and Vogel, \{Eric M\}",

year = "2013",

language = "Undefined/Unknown",

volume = "53",

pages = "161",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "IOP Publishing",

number = "1",

}