Impact of N2 and forming gas plasma exposure on the growth and interfacial characteristics of Al2O3 on AlGaN

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@article{92c7943d60ec492aa610bf25d91b8328,

title = "Impact of N2 and forming gas plasma exposure on the growth and interfacial characteristics of Al2O3 on AlGaN",

author = "Xiaoye Qin and Hong Dong and Barry Brennan and Angelica Azacatl and Jiyoung Kim and Wallace, \{Robert M\}",

year = "2013",

language = "Undefined/Unknown",

volume = "103",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "AIP Publishing",

number = "22",

}

TY - JOUR

T1 - Impact of N2 and forming gas plasma exposure on the growth and interfacial characteristics of Al2O3 on AlGaN

AU - Qin, Xiaoye

AU - Dong, Hong

AU - Brennan, Barry

AU - Azacatl, Angelica

AU - Kim, Jiyoung

AU - Wallace, Robert M

PY - 2013

Y1 - 2013

M3 - Article

SN - 0003-6951

VL - 103

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 22

ER -