Indium diffusion through high-k dielectrics in high-k/InP stacks

Hong Dong; W Cabrera; Rohit V Galatage; Santosh Kc; B Brennan; X Qin; Stephen McDonnell; Dmitry M Zhernokletov; Christopher L Hinkle; K Cho

Indium diffusion through high-k dielectrics in high-k/InP stacks

Hong Dong
, W Cabrera
, Rohit V Galatage
, Santosh Kc
, B Brennan
, X Qin
, Stephen McDonnell
, Dmitry M Zhernokletov
, Christopher L Hinkle
, K Cho

Research output: Contribution to journal › Article › peer-review

37 Citations (Scopus)

Original language	Undefined/Unknown
Journal	Applied Physics Letters
Volume	103
Issue number	6
Publication status	Published - 2013

Cite this

@article{6acbe9077a90466ea424ac023a3ad9d5,

title = "Indium diffusion through high-k dielectrics in high-k/InP stacks",

author = "Hong Dong and W Cabrera and Galatage, \{Rohit V\} and Santosh Kc and B Brennan and X Qin and Stephen McDonnell and Zhernokletov, \{Dmitry M\} and Hinkle, \{Christopher L\} and K Cho",

year = "2013",

language = "Undefined/Unknown",

volume = "103",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "AIP Publishing",

number = "6",

}

TY - JOUR

T1 - Indium diffusion through high-k dielectrics in high-k/InP stacks

AU - Dong, Hong

AU - Cabrera, W

AU - Galatage, Rohit V

AU - Kc, Santosh

AU - Brennan, B

AU - Qin, X

AU - McDonnell, Stephen

AU - Zhernokletov, Dmitry M

AU - Hinkle, Christopher L

AU - Cho, K

PY - 2013

Y1 - 2013

M3 - Article

SN - 0003-6951

VL - 103

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 6

ER -