Investigation of arsenic and antimony capping layers, and half cycle reactions during atomic layer deposition of Al<inf>2</inf>O<inf>3</inf> on GaSb(100)

D.M. Zhernokletov, H. Dong, B. Brennan, Jiyoung Kim, R.M. Wallace, M. Yakimov, V. Tokranov, S. Oktyabrsky

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Original language	Undefined/Unknown
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
DOIs	https://doi.org/10.1116/1.4817496
Publication status	Published - 2013

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title = "Investigation of arsenic and antimony capping layers, and half cycle reactions during atomic layer deposition of Al2O3 on GaSb(100)",

author = "D.M. Zhernokletov and H. Dong and B. Brennan and Jiyoung Kim and R.M. Wallace and M. Yakimov and V. Tokranov and S. Oktyabrsky",

year = "2013",

doi = "10.1116/1.4817496",

language = "Undefined/Unknown",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

}

TY - JOUR

T1 - Investigation of arsenic and antimony capping layers, and half cycle reactions during atomic layer deposition of Al2O3 on GaSb(100)

AU - Zhernokletov, D.M.

AU - Dong, H.

AU - Brennan, B.

AU - Kim, Jiyoung

AU - Wallace, R.M.

AU - Yakimov, M.

AU - Tokranov, V.

AU - Oktyabrsky, S.

PY - 2013

Y1 - 2013

UR - https://www.scopus.com/pages/publications/84887974251

U2 - 10.1116/1.4817496

DO - 10.1116/1.4817496

M3 - Article

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

ER -