Investigation of arsenic and antimony capping layers, and half cycle reactions during atomic layer deposition of Al2O3 on GaSb (100)

Dmitry M Zhernokletov; Hong Dong; Barry Brennan; Jiyoung Kim; Robert M Wallace; Michael Yakimov; Vadim Tokranov; Serge Oktyabrsky

Investigation of arsenic and antimony capping layers, and half cycle reactions during atomic layer deposition of Al2O3 on GaSb (100)

Dmitry M Zhernokletov
, Hong Dong
, Barry Brennan
, Jiyoung Kim
, Robert M Wallace
, Michael Yakimov
, Vadim Tokranov
, Serge Oktyabrsky

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Original language	Undefined/Unknown
Journal	Journal of Vacuum Science Technology A
Volume	31
Issue number	6
Publication status	Published - 2013

Cite this

@article{843d452b68c04ded8b8db2a685a0afc2,

title = "Investigation of arsenic and antimony capping layers, and half cycle reactions during atomic layer deposition of Al2O3 on GaSb (100)",

author = "Zhernokletov, \{Dmitry M\} and Hong Dong and Barry Brennan and Jiyoung Kim and Wallace, \{Robert M\} and Michael Yakimov and Vadim Tokranov and Serge Oktyabrsky",

year = "2013",

language = "Undefined/Unknown",

volume = "31",

journal = "Journal of Vacuum Science Technology A",

publisher = "AIP Publishing",

number = "6",

}

TY - JOUR

T1 - Investigation of arsenic and antimony capping layers, and half cycle reactions during atomic layer deposition of Al2O3 on GaSb (100)

AU - Zhernokletov, Dmitry M

AU - Dong, Hong

AU - Brennan, Barry

AU - Kim, Jiyoung

AU - Wallace, Robert M

AU - Yakimov, Michael

AU - Tokranov, Vadim

AU - Oktyabrsky, Serge

PY - 2013

Y1 - 2013

M3 - Article

VL - 31

JO - Journal of Vacuum Science Technology A

JF - Journal of Vacuum Science Technology A

IS - 6

ER -