Study of dislocations and stress in silicon-on-insulator tubs using transmission electron microscopy and finite element modelling
- A. J. McMullan
- , D. O'Mahoney
- , W. A. Nevin
- , A. T. Paxton
- , J. M. Gregg
- Queen's University Belfast
- Tyndall National Institute
- Analog Devices, Inc.
Research output: Contribution to conference › Paper › peer-review